Smith B Microlithography - Science and Technology 3ed 2020 torrent

Textbook in PDF format

The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world’s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.
Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.
Table of Content
Chapter 1 Lithography, Etch, and Silicon Process Technology
Chapter 2 Optical Nanolithography
Chapter 3 Multiple Patterning Lithography
Chapter 4 EUV Lithography
Chapter 5 Alignment and Overlay
Chapter 6 Design for Manufacturing and Design Process Technology Co-Optimization
Chapter 7 Chemistry of Photoresist Materials
Chapter 8 Photoresist and Materials Processing
Chapter 9 Optical Lithography Modeling
Chapter 10 Maskless Lithography
Chapter 11 Imprint Lithography
Chapter 12 Metrology for Nanolithography
Chapter 13 Directed Self-Assembly of Block Copolymers